Reduced basis method for source mask optimization

Image modeling and simulation are critical to extending the limits of leading edge lithography technologies used for IC making. Simultaneous source mask optimization (SMO) has become an important objective in the field of computational lithography. SMO is considered essential to extending immersion lithography beyond the 45nm node. However, SMO is computationally extremely challenging and time-consuming. The key challenges are due to run time vs. accuracy tradeoffs of the imaging models used for the computational lithography. We present a new technique to be incorporated in the SMO flow. This new approach is based on the reduced basis method (RBM) applied to the simulation of light transmission through the lithography masks. It provides a rigorous approximation to the exact lithographical problem, based on fully vectorial Maxwell's equations. Using the reduced basis method, the optimization process is divided into an offline and an online steps. In the offline step, a RBM model with variable geometrical parameters is built self-adaptively and using a Finite Element (FEM) based solver. In the online step, the RBM model can be solved very fast for arbitrary illumination and geometrical parameters, such as dimensions of OPC features, line widths, etc. This approach dramatically reduces computational costs of the optimization procedure while providing accuracy superior to the approaches involving simplified mask models. RBM furthermore provides rigorous error estimators, which assure the quality and reliability of the reduced basis solutions. We apply the reduced basis method to a 3D SMO example. We quantify performance, computational costs and accuracy of our method.Comment: BACUS Photomask Technology 201

The status of shark and ray fishery resources in the Gulf of California: applied research to improve management and conservation

Seasonal surveys were conducted during 1998–1999 in Baja California, Baja California Sur, Sonora, and Sinaloa to determine the extent and activities of artisanal elasmobranch fisheries in the Gulf of California. One hundred and forty–seven fishing sites, or camps, were documented, the majority of which (n = 83) were located in Baja California Sur. Among camps with adequate fisheries information, the great majority (85.7%) targeted elasmobranchs during some part of the year. Most small, demersal sharks and rays were landed in mixed species fisheries that also targeted demersal teleosts, but large sharks were usually targeted in directed drift gillnet or, to a lesser extent, surface longline fisheries. Artisanal fishermen were highly opportunistic, and temporally switched targets depending on the local productivity of teleost, invertebrate, and elasmobranch fishery resources. Major fisheries for small sharks ( 1.5 m, “tiburón”) were minor components of artisanal elasmobranch fisheries in Sonora and Sinaloa, but were commonly targeted during summer and early autumn in Baja California and Baja California Sur. The pelagic thresher shark (Alopias pelagicus) and silky shark (Carcharhinus falciformis) were most commonly landed in Baja California, whereas a diverse assemblage of pelagic and large coastal sharks was noted among Baja California Sur landings. Rays dominated summer landings in Baja California and Sinaloa, when elevated catch rates of the shovelnose guitarfish (Rhinobatos productus, 13.2 individuals/vessel/trip) and golden cownose ray (Rhinoptera steindachneri, 11.1 individuals/vesse/trip) primarily supported the respective fisheries. The Sonoran artisanal elasmobranch fishery was the most expansive recorded during this study, and rays (especially R. productus) dominated spring and summer landings in this state. Seasonal catch rates of small demersal sharks and rays were considerably greater in Sonora than in other surveyed states. Many tiburón populations (e.g., C. leucas, C. limbatus, C. obscurus, Galeocerdo cuvier) have likely been overfished, possibly shifting effort towards coastal populations of cazón and rays. Management recommendations, including conducting demographic analyses using available life history data, determining and protecting nursery areas, and enacting seasonal closures in areas of elasmobranch aggregation (e.g., reproduction, feeding), are proposed. Without effective, enforceable management to sustain or rebuild targeted elasmobranch populations in the Gulf of California, collapse of many fisheries is a likely outcome. (PDF contains 243 pages

El estado actual de los tiburones y rayas sujectos a explotación comercial en el Golfo de California: una investigación aplicada al mejoramiento de su manejo pesquero y conservación

Se realizaron prospecciones estacionales durante 1998–1999 en Baja California, Baja California Sur, Sonora y Sinaloa para determinar la dimensión y las actividades de las pesquerías artesanales de elasmobranquios dentro del Golfo de California. Ciento cuarenta y siete campamentos o sitios pesqueros fueron documentados, la mayoría de los cuales (n= 83) fueron localizados en Baja California Sur. Entre los campamentos con información pesquera adecuada, la gran mayoría (85.7%) pescaron elasmobranquios en algún momento del año. La mayoría de los pequeños tiburones y rayas demersales fueron capturados en pesquerías multiespecíficas, las cuales también tienen como objetivo teleósteos, pero los grandes tiburones fueron capturados generalmente por pesquerías de redes agalleras a la deriva dirigidas a ellos, o en menor grado, por pesquerías de palangre de superficie. Los pescadores artesanales presentaron un comportamiento altamente oportunístico y temporalmente cambiaban de especie objetivo dependiendo de la productividad de los recursos pesqueros locales de especies de escama, invertebrados y elasmobranquios. Las mayores pesquerías de pequeños tiburones (≤1.5 m, “cazón”) se documentaron en Baja California, Sonora, y Sinaloa durante la primavera y adicionalmente durante otoño e invierno en Sonora. Los tiburones del genero Mustelus (Mustelus spp) dominaron los desembarques de cazón en los estados norteños, mientras que los tiburones martillo juveniles (Sphyrna lewini) sostuvieron la pesquería en Sinaloa. Los grandes tiburones (> 1.5 m, “tiburón”) fueron componente menor de las pesquerías artesanales de elasmobranquios en Sonora y Sinaloa, pero comúnmente fueron capturados en verano y principios de otoño en Baja California y Baja California Sur. El tiburón zorro pelágico (Alopias pelagicus) y el tiburón piloto (Carcharhinus falciformis) fueron comúnmente desembarcados en Baja California, mientras que un diverso ensamble de tiburones pelágicos y grandes costeros fueron observados en los desembarques de Baja California Sur. Las rayas dominaron los desembarques en verano en Baja California y Sinaloa, sostenidas principalmente por elevadas tasas de captura de la guitarra común (Rhinobatos productus, 13.2 individuos/embarcación/viaje) y del tecolote (Rhinoptera steindachneri, 11.1 individuos/embarcación/viaje). La pesquería de rayas de Sonora fue la más extensamente documentada durante este estudio y las rayas (especialmente R. productus) dominaron los desembarques en primavera y verano en este estado. Las tasas de captura estacionales de pequeños tiburones demersales y rayas fueron considerablemente mayores en Sonora que en los otros estados prospectados. Numerosas poblaciones de tiburón (p. ej. C. leucas, C. limbatus, C. obscurus, Galeocerdo cuvier) han sido probablemente sobreexplotados, lo que posiblemente este causando un cambio en el esfuerzo hacia las poblaciones de cazón y rayas costeros. Se proponen recomendaciones de manejo, incluyendo conducir análisis demográficos empleando la información de historias de vida disponible, localizando y protegiendo áreas de crianza e implementando temporadas de veda estacional en las áreas de mayor concentración de elasmobranquios (p. ej. alimentación, reproducción). Sin un manejo pesquero efectivo, vigilado, para sostener o reconstruir las poblaciones de elasmobranquios sujetas a explotación comercial dentro del Golfo de California, el colapso de las pesquerías es un evento probable. (PDF contains 261 pages

Two-proton small-angle correlations in central heavy-ion collisions: a beam-energy and system-size dependent study

Small-angle correlations of pairs of protons emitted in central collisions of Ca + Ca, Ru + Ru and Au + Au at beam energies from 400 to 1500 MeV per nucleon are investigated with the FOPI detector system at SIS/GSI Darmstadt. Dependences on system size and beam energy are presented which extend the experimental data basis of pp correlations in the SIS energy range substantially. The size of the proton-emitting source is estimated by comparing the experimental data with the output of a final-state interaction model which utilizes either static Gaussian sources or the one-body phase-space distribution of protons provided by the BUU transport approach. The trends in the experimental data, i.e. system-size and beam energy dependences, are well reproduced by this hybrid model. However, the pp correlation function is found rather insensitive to the stiffness of the equation of state entering the transport model calculations.Comment: 9 pages, 8 figures, accepted at Eur. Phys. Journ.

Measurement of K∗(892)0K^*(892)^0 and K0K^0 mesons in Al+Al collisions at 1.9AA GeV

New measurement of sub-threshold $K^*(892)^0$ and $K^0$ production is presented. The experimental data complete the measurement of strange particles produced in Al+Al collisions at 1.9$A$ GeV measured with the FOPI detector at SIS/GSI. The $K^*(892)^0$ / $K^0$ yield ratio is found to be $0.0315\pm 0.006 (\mathrm{stat.})\pm 0.012 (\mathrm{syst.})$ and is in good agreement with the UrQMD model prediction. These measurements provide information on in-medium cross section of $K^+$ - $\pi^-$ fusion which is the dominant process on sub-threshold $K^*(892)^0$ production.Comment: 5 pages, 4 figures, accepted for publication in Phys. Rev.

Isospin dependence of relative yields of K+K^+ and K0K^0 mesons at 1.528 AGeV

Results on $K^+$ and $K^0$ meson production in $^{96}_{44}$Ru + $^{96}_{44}$Ru and $^{96}_{40}$Zr + $^{96}_{40}$Zr collisions at a beam kinetic energy of 1.528$A$ GeV, measured with the FOPI detector at GSI-Darmstadt, are investigated as a possible probe of isospin effects in high density nuclear matter. The measured double ratio ($K^+/K^0$)$_{Ru}$/($K^+/K^0$)$_{Zr}$ is compared to the predictions of a thermal model and a Relativistic Mean Field transport model using two different collision scenarios and under different assumptions on the stiffness of the symmetry energy. We find a good agreement with the thermal model prediction and the assumption of a soft symmetry energy for infinite nuclear matter while more realistic transport simulations of the collisions show a similar agreement with the data but also exhibit a reduced sensitivity to the symmetry term.Comment: 5 pages, 3 figures. accepted for publication in Phys. Rev.

First analysis of anisotropic flow with Lee--Yang zeroes

We report on the first analysis of directed and elliptic flow with the new method of Lee--Yang zeroes. Experimental data are presented for Ru+Ru reactions at 1.69 AGeV measured with the FOPI detector at SIS/GSI. The results obtained with several methods, based on the event-plane reconstruction, on Lee--Yang zeroes, and on multi-particle cumulants (up to 5th order) applied for the first time at SIS energies, are compared. They show conclusive evidence that azimuthal correlations between nucleons and composite particles at this energy are largely dominated by anisotropic flow.Comment: 5 pages, 3 figures, submitted to Phys. Rev. C Rapid Co

Charged pion production in 4496^{96}_{44}Ru+4496^{96}_{44}Ru collisions at 400A and 1528A MeV

We present transverse momentum and rapidity spectra of charged pions in central Ru + Ru collisions at 400$A$ and 1528$A$ MeV. The data exhibit enhanced production at low transverse momenta compared to the expectations from the thermal model that includes the decay of $\Delta(1232)$-resonances and thermal pions. Modification of the $\Delta$-spectral function and the Coulomb interaction are necessary to describe the detailed shape of the transverse momentum spectra. Within the framework of the thermal model, the freeze-out radii of pions are similar at both beam energies. The IQMD model reproduces the shapes of the transverse momentum and rapidity spectra of pions, but the predicted absolute yields are larger than in the measurements, especially at lower beam energy.Comment: 12 pages, 11 figure

Directed flow in Au+Au, Xe+CsI and Ni+Ni collisions and the nuclear equation of state

We present new experimental data on directed flow in collisions of Au+Au, Xe+CsI and Ni+Ni at incident energies from 90 to 400A MeV. We study the centrality and system dependence of integral and differential directed flow for particles selected according to charge. All the features of the experimental data are compared with Isospin Quantum Molecular Dynamics (IQMD) model calculations in an attempt to extract information about the nuclear matter equation of state (EoS). We show that the combination of rapidity and transverse momentum analysis of directed flow allow to disentangle various parametrizations in the model. At 400A MeV, a soft EoS with momentum dependent interactions is best suited to explain the experimental data in Au+Au and Xe+CsI, but in case of Ni+Ni the model underpredicts flow for any EoS. At 90A MeV incident beam energy, none of the IQMD parametrizations studied here is able to consistently explain the experimental data.Comment: RevTeX, 20 pages, 30 eps figures, accepted for publication in Phys. Rev. C. Data files available at http://www.gsi.de/~fopiwww/pub